Semiconductor
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For more than 20 years Setra pressure transducers have been handling a variety of critical jobs in the semiconductor industry. Setra pressure transducers can be found throughout the GDS system from distribution of the bulk gases and specialty gases to the process tool, where submicron fabrication of semiconductor integrated circuits takes place.
Known for their high accuracy, Setra’s pressure transducer stability and reliability have made them valuable to applications such as:
> In situ process pressure measurement
> Pressure measurement of purge gas delivery systems
> Loadlock pressure measurement and control
> Clean room air control
> Leak detection
> Fume hood controls
> Laser interferometers
> Solar & Energy
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Pressure Transducers
Capacitance manometer, great thermal stability, EMI/RFI performance, low cost, compact
UHP, gauge, compound or absolute PSI and Bar ranges for modular gas sticks
UHP flow-though, gauge, compound or absolute PSI and Bar ranges w/ EMI/RFI immunity
UHP flow-through, EMI/RFI immunity, optional UL 1604 and ATEX 94/9/EC approval
UHP, gauge, compound or absolute PSI and Bar ranges w/ EMI/RFI immunity
UHP, 1 1/8” downmount, EMI/RFI immunity, optional UL 1604 and ATEX 94/9/EC
Local display, inline installation, low power consumption, selectable engineering units
1 1/8” micro-display, 360° rotating face, for use in high-density modular gas sticks