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Ultra-High Purity                                                      
Heated 700 Series Vacuum Pressure Transducers
Models 764/769/774


Applications

  • Plasma Deposition/Etch
  • Sputtering/PVD/RTP 
  • Industrial CVD/Ion Implantation
  • LPCVD
  • Crystal Growing/Freeze Dryers
Heated 700 Series Specifications
Model 764 Temperature controlled to 45°C 
Model 769 Temperature controlled to 100°C
Model 774 Temperature controlled to 123°C
Type of Pressure Absolute
Electrical Output (Voltage)

0 to 10 VDC

Resolution

0.005% of FS

Accuracy ±0.15% of Reading + 005% of FS
Excitation

±15 VDC ±5% Regulated to 1%

Pressure Ranges 50 mTorr: Model 764 only
100 mTorr: Model 764 and 769 only
0 to 1, 2, 10, 100, 1000 Torr
1, 10, 100, 1000 Millibar/hPa
Thermal Effects
Compensated Range °C: +15 to +40
Zero Shift: >1 Torr = 0.002% FS/°C 
                <=  1 Torr = 0.005% FS/°C
Span Shift: ±0.02% Rdg/°C 
Media Gases compatible with Inconel®

Click here for data sheet Model 764/769/774

* Specifications subject to change without notice. If you don't see what you need here, please contact us.

   
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