Semiconductor

For more than 20 years Setra pressure transducers have been handling a variety of critical jobs in the semiconductor industry. Setra pressure transducers can be found throughout the GDS system from distribution of the bulk gases and specialty gases to the process tool, where submicron fabrication of semiconductor integrated circuits takes place.

  

Known for their high accuracy, Setra’s pressure transducer stability and reliability have made them valuable to applications such as:

 

> In situ process pressure measurement

> Pressure measurement of purge gas delivery systems

> Loadlock pressure measurement and control

> Clean room air control

> Leak detection

> Fume hood controls

> Laser interferometers

> Solar & Energy

Pressure Transducers

  • Model 760 Vactron™ Series

    Model 760 Vactron™ Series

    Capacitance manometer, great thermal stability, EMI/RFI performance, low cost, compact

  • Model 217

    Model 217

    UHP, gauge, compound or absolute PSI and Bar ranges for modular gas sticks

  • Model 223

    Model 223

    UHP flow-though, gauge, compound or absolute PSI and Bar ranges w/ EMI/RFI immunity

  • Model 224

    Model 224

    UHP flow-through, EMI/RFI immunity, optional UL 1604 and ATEX 94/9/EC approval

  • Model GCT-225

    Model GCT-225

    UHP, gauge, compound or absolute PSI and Bar ranges w/ EMI/RFI immunity

  • Model 227

    Model 227

    UHP, 1 1/8” downmount, EMI/RFI immunity, optional UL 1604 and ATEX 94/9/EC

  • Model 759

    Model 759

    Absolute vacuum for gases compatible with Inconel® and Monel®, 10 Torr up to 1000 Torr

  • Model 764

    Model 764

    Heated vacuum CDG, temp controlled to 45°C, Inconel® wetted parts prevent corrosion

  • Model 769

    Model 769

    Heated vacuum CDG, temp controlled to 100°C, Inconel® wetted parts prevent corrosion

  • Model 774

    Model 774

    Heated vacuum CDG, temp controlled to 123°C, Inconel® wetted parts prevent corrosion

  • Model LD 330

    Model LD 330

    Local display, inline installation, low power consumption, selectable engineering units

  • Model 328

    Model 328

    1 1/8” micro-display, 360° rotating face, for use in high-density modular gas sticks